planarizing

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planarizing — noun The process of making something planar; flattening … Wiktionary
Microfabrication — Synthetic detail of a micromanufactured integrated circuit through four layers of planarized copper interconnect, down to the polysilicon (pink), wells (greyish) and substrate (green) Microfabrication is the term that describes processes of… … Wikipedia
planarization — noun The act or process of planarizing … Wiktionary

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